Dependence of surface morphology of CVD diamond films on deposition conditions

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摘要 ThediamondfilmshavebeendepositedbythehotfilamentCVDmethodonmolybdenumsubstratesfromthemixturereactantgasofacetoneandhy-drogen.Thesurfacemorphologiesoftheobtaineddiamondfilmsundervariousde-positionconditionshavebeenobservedbyscanningelectronmicroscope(SEM).Theexperimentalresultsstronglyindicatethatthesurfacemorphologiesofthere-sultingfilmshavecloselyrelatedtothedepositionconditions,i.e.,reactionpres-sure.Formolybdenumsubstrates,underthelowerreactionpressurethesurfacemorphologiesofthegrainscomprisingtheresultingfilmsmainlydisplaythesmallsinglecrystalcubo-octahedronanddoublesmallcrystalcubo-octahedron;underthehigherreactionpressure,thesurfacemorphologiesmainlydisplaythelargecauliflower-like.TheseresultsshowthattherearevariouscrystalhabitsforCVDdiamondundervariousdepositionconditions.
机构地区 不详
出版日期 1995年01月11日(中国期刊网平台首次上网日期,不代表论文的发表时间)
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