Terahertz(THz)technologypromisesimportantapplicationsincludingimaging,spectroscopy,andcommunications.However,oneoflimitationsatpresentforadvancingTHzapplicationsisthelackofefficientdevicestomanipulateTHzwaves.Here,ourrecentimportantprogressesinTHzfunctionaldevicesbasedonartificialmicrostructures,suchasphotoniccrystal,metamaterial,andplasmonicstructures,havebeenreviewedinthispaper,involvingtheTHzmodulator,isolator,andsensor.TheseTHzmicrostructurefunctionaldevicesexhibitgreatpromisingpotentialinTHzapplicationsystems.