Inexperimentalstudyofthetindioxidegassensor,insitusheetconductivitywasmeasuredwithultrahighvacuumfourpointresistivityprobe.Surfacecompositionandstoi-chiometryweredetectedusingXPS.FourseparatestructurephaseswereobtainedbyLEEDatdifferentannealingtemperature,andemissionwasobservedthroughoutthebandgapuptotheFermilevelwithUPS.Furthermore,effectsofannealingtemperatureanddosedoxygenpressureonthesurfacereconstruction,O/Snratio,sheetconductivity,variationoftheworkfunctionandbandbendinghavebeenalsoinvestigated.Theresultshelpustorevealtherelationshipsbetweentheelectronicandelectricalpropertiesofthematerialanditsnativedefectsstructure.Itises-peciallyusefultoprovideamorecompleteunderstandingofthebasicoperationmechanismsforsuchsensingmaterials.
