AlowfinenesseFabry-Perotinterferometricdisplacementsensorhasbeendevelopedandtested.WithusingahighstabilityHe-Nelaserandperfectsignalprocessingcircuits,noiselevelof0.01nmequivalenttoreflectordisplacementwasob-tainedinabandwidthof0-1kHz.
半导体光子学与技术:英文版
1996年3期