简介:Anewpiezoelectricpumpcanpumpliquideitherforwardorbackwardandadjusttheflowrate.Thusanobjectcanbedrivenforwardorbackwardatdifferentspeeds.Thedriverofthepump,acircularpiezoelectricplate,ismodelledbyFiniteElementMethod(FEM)inANSYSanditsperformanceissimulatedandanalyzed.Thepumpgivesthebestperformancewhenthedrivingsignalsoftheinletandoutletvalveshaveabiggerdutycycleandtheplatehasahighervoltageapplied.